BS EN 62047-8-2011 半导体装置.微电机装置.薄膜拉伸性能测量用带材弯曲试验方法

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【英文标准名称】:Semiconductordevices.Micro-electromechanicaldevices.Stripbendingtestmethodfortensilepropertymeasurementofthinfilms
【原文标准名称】:半导体装置.微电机装置.薄膜拉伸性能测量用带材弯曲试验方法
【标准号】:BSEN62047-8-2011
【标准状态】:现行
【国别】:英国
【发布日期】:2011-06-30
【实施或试行日期】:2011-06-30
【发布单位】:英国标准学会(GB-BSI)
【起草单位】:BSI
【标准类型】:()
【标准水平】:()
【中文主题词】:
【英文主题词】:Bendtesting;Characteristics;Components;Films;Layers;Materials;Measurement;Measuringtechniques;Microelectronics;Microsystemtechniques;Properties;Samples;Semiconductordevices;Strips;Systemengineering;Tensilestrain;Testing;Testingconditions;Thinfilms;Thin-filmtechnology
【摘要】:Thisinternationalstandardspecifiesthestripbendingtestmethodtomeasuretensilepropertiesofthinfilmswithhighaccuracy,repeatability,moderateeffortofalignmentandhandlingcomparedtotheconventionaltensiletest.Thistestingmethodisvalidfortestpieceswithathicknessbetween50nmandseveralmm,andwithanaspectratio(ratiooflengthtothickness)ofmorethan300.Thehangingstrip(orbridge)betweentwofixedsupportsarewidelyadoptedinMEMSormicro-machines.Itismucheasiertofabricatethesestripsthantheconventionaltensiletestpieces.Thetestproceduresaresosimpletobereadilyautomated.ThisinternationalstandardcanbeutilizedasaqualitycontroltestforMEMSproductionsinceitstestingthroughputisveryhighcomparedtotheconventionaltensiletest.
【中国标准分类号】:L40
【国际标准分类号】:31_080_99
【页数】:22P.;A4
【正文语种】:英语